Publicación: CHARACTERIZATION OF PHOTOCHEMICALLY GROWN PD LOADED WO3 THIN FILMS AND ITS EVALUATION AS AMMONIA GAS SENSOR
Fecha
2020
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JOURNAL OF ALLOYS AND COMPOUNDS
Resumen
PD-LOADED TUNGSTEN OXIDE THIN FILMS HAVE BEEN SUCCESSFULLY FABRICATED BY DIRECT UV IRRADIATION OF BIS(BETA-IKETONATE)DIOXOTUNGSTEN(VI) AND PD(II) PRECURSOR COMPLEXES SPIN-COATED ON SI(100) SUBSTRATES. X-RAY DIFFRACTION (XRD) AND X-RAY PHOTOELECTRON SPECTROSCOPY (XPS) WERE USED TO ANALYZE THE CRYSTAL STRUCTURE AND THE CHEMICAL COMPOSITION OF THE FILMS BEFORE AND AFTER ANNEALING AT 500 °C. THE RESULTS OF XRD AND AFM ANALYSIS SHOWED THAT THE AS-PHOTODEPOSITED FILMS ARE AMORPHOUS WHEREAS THERMALLY TREATED FILMS PRESENT A ROUGHER MORPHOLOGY. POST-ANNEALING OF THE FILMS IN AIR AT 500 °C TRANSFORMS THE OXIDES TO A MONOCLINIC WO3 PHASE. ANNEALED 10% PD/WO3 FILMS EXHIBITED AN EXCELLENT RESPONSE TOWARDS 50 PPM AMMONIA GAS AT AN OPERATING TEMPERATURE OF 300 °C. THE PD-LOADED SENSORS PRESENTED HIGHER SENSITIVITY AND QUICKER RESPONSE-RECOVERY RATES THAN UNLOADED WO3 FILMS.
